810-370141-001 may refer to a dry etching chamber assembly produced by LAM Technologies.Here are the details of the product:

1.Product Overview

The 810-370141-001 dry etching chamber assembly is a precision component used in dry etching processes.It is made of a variety of materials and can withstand the chemicals and plasma used in the dry etching process.

2.Applications

Semiconductor manufacturing:used to etch patterns on wafers.

Optoelectronic device manufacturing:used to etch photolithography masks.

Microelectromechanical system(MEMS)manufacturing:used to etch microstructures.

3.Product Features

High precision:can achieve high-precision etching.

High reliability:can withstand harsh dry etching environments.

Long life:can be used for a long time.

Easy to maintain:easy to clean and replace.

4.Specifications

Size:depends on the specific application.

Material:a variety of materials,including ceramics,metals and polymers.

Compatibility:various dry etching chemicals and plasmas.

5.Working Principle

The component exposes the material to be etched to plasma,and the ions in the plasma bombard the surface of the material,thereby removing the material.The design of the component ensures uniform etching rate and good profile control.